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Design and control of a single-chip SOI-MEMS atomic force microscope

On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach

4-DOF SOI-MEMS ultrasonic energy harvester

A 4-DOF MEMS energy harvester using ultrasonic excitation

Internal model control for spiral trajectory tracking with MEMS AFM scanners

High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy

MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design

Note: a silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy

Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner

A feedback controlled MEMS nanopositioner for on-chip high-speed AFM

An omnidirectional MEMS ultrasonic energy harvester for implanted devices

Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing

MEMS nanopositioner for Lissajous-scan atomic force microscopy

A MEMS electromagnetic energy harvester using ultrasonic excitation

Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation

Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing

Design and characterization of a 2-DOF MEMS ultrasonic energy harvester with triangular electrostatic electrodes

A 3-DoF MEMS ultrasonic energy harvester

Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing

Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters

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